Semiconductor process – Paul Wu's Blog

Some notes about ITO

Indium tin oxide (ITO) is tin-doped In₂O₃, a n-type wide-bandgap heavily doped (or degenerate) semiconductor with certain metal-like properties. Therefore it is a transparent conductor, and broadly used in variety of industries.

Cryopump and maintenance

Provided temperature is low enough, all gas molecules can be condensed onto a cold surface and thus creates vacuum in an enclosed chamber.

Laser ablation mechanisms

There are two mechanisms to explain laser ablation process: Classical beam-matter interaction mechanism for micro- and nano-second pulse laser ablation and two temperature mechanism for pico-and femto-second pulse laser ablation.

Laser ablation

In the publication of Brian Q, et al., Optics and Laser Technology (2012), the authors reported a laser ablation method to pattern ITO film on a glass substate for the solar cell fabrication.

Deep reactive ion etching (DRIE)

Deep receive ion etching (DRIE) include two process: Bosch process and Cryogenic process (Reference 1).

Dry etching

It is difficult for wet etching to achieve good anisotropy in fabrication; therefore dry etching is adopted to solve this problem.

Wet etching

Etching is an important step in the fabrication of semiconductor devices and other similar process. It includes wet etching, a solution based method, and drying etching, based on vacuum process typically.

Wafer dicing and grinding

Some nice videos from DISCO company website. Always good to understand the process in order to select or recommend most suitable materials for the best results.